Compliant Structures

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We are building flexible sensors and actuators using strain-engineered fabrication. Applications of these compliant structures include three-dimensional electrodes for impedance-based “lab on a chip” detection systems, polarization-insensitive antenna array elements, shape sensors, and actuators for use in air, water, and vacuum. The compliant structures in our work range from the centimeter to micrometer scale:

Islam, Mohammad S, Sushmita Challa, M H Yacin, Sruthi S Vankayala, Nathan Song, Danming Wei, Jasmin Beharic, and Cindy K Harnett. 2023. "Thermally driven MEMS fiber-grippers." Journal of Micro and Bio Robotics, August. https://doi.org/10.1007/s12213-023-00161-w.
Song, Nathan, Danming Wei, and Cindy K Harnett. 2023. "Powering Wire-Mesh Circuits through MEMS Fiber-Grippers." In 2023 IEEE International Conference on Flexible and Printable Sensors and Systems (FLEPS), 1–4. https://doi.org/10.1109/FLEPS57599.2023.10220225.
Bupe, Paul, and C K Harnett. 2023. "OptiGap: A Modular Optical Sensor System for Bend Localization." In 2023 IEEE International Conference on Robotics and Automation (ICRA), 620–26. https://doi.org/10.1109/ICRA48891.2023.10161357.
Kimmer, Christopher J, Michael Seokyoung Han, and Cindy K Harnett. 2023. "Strained Elastic Surfaces with Adjustable-Modulus Edges (SESAMEs) for Soft Robotic Actuation." In 2023 IEEE International Conference on Robotics and Automation (ICRA), 7352–58. https://doi.org/10.1109/ICRA48891.2023.10160299.
Lin, Ji-Tzuoh, Christopher Newquist, and CK Harnett. 2022. "Multitouch Pressure Sensing with Soft Optical Time-of-Flight Sensors." IEEE Transactions on Instrumentation and Measurement 71 (January): 1–8. https://doi.org/10.1109/TIM.2022.3141159.
Han, Michael Seokyoung, and Cindy K Harnett. 2022. "Soft, All-Polymer Optoelectronic Tactile Sensor for Stick-Slip Detection." Advanced Materials Technologies, 2200406.
Wei, Danming, Sushmita Challa, Mohammad S Islam, Jasmin Beharic, Cindy K Harnett, and Dan O Popa. 2022. "Multi-Robot Collaboration for Electronic Textile Fabrication." In 2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), 1–6. IEEE.
Islam, MS, S Challa, MH Yassin, SS Vankayala, J Beharic, and CK Harnett. 2022. "MEMS Bimorph Fiber-Gripping Actuators." In 2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS), 1–6. IEEE.
Bupe, Paul, Douglas J Jackson, and CK Harnett. 2022. "Electronically Reconfigurable Virtual Joints by Shape Memory Alloy-Induced Buckling of Curved Sheets." In Proceedings of IEEE SoutheastCon 2022, 598–604. IEEE.
Beharic, J, KT James, RS Keynton, MG O’Toole, and CK Harnett. 2021. “Impact of Microfabrication Processing Temperatures on the Resonant Wavelength of Gold Nanoplates.” Materials Letters 284: 128967. https://doi.org/10.1016/j.matlet.2020.128967.
Challa, Sushmita, M Shafquatul Islam, Danming Wei, Jasmin Beharic, Dan O Popa, and CK Harnett. 2021. “Functional Fiber Junctions for Circuit Routing in E-Textiles: Deterministic Alignment of MEMS Layout With Fabric Structure.” In International Manufacturing Science and Engineering Conference, 85079:V002T08A009. American Society of Mechanical Engineers. https://doi.org/10.1115/MSEC2021-63887.
Lin, Ji-Tzuoh, and CK Harnett. 2020. "Absolute Length Sensor Based on Time of Flight in Stretchable Optical Fibers." IEEE Sensors Letters 4 (10): 1–4. https://doi.org/10.1109/LSENS.2020.3028332.
Harnett, Cindy. 2020. "Making Soft Optical Sensors More Wearable." MRS Advances, 1–6.
Challa, Sushmita, and Cindy Harnett. 2020. "Packaging Electronics on Textiles: Identifying Fiber Junctions for Automated Placement." In International Manufacturing Science and Engineering Conference, 84263:V002T09A004. American Society of Mechanical Engineers.
Challa, Sushmita, Canisha Ternival, Shafquatul Islam, Jasmin Beharic, and Cindy K Harnett. 2019. "Transferring Microelectromechanical Devices to Breathable Fabric Carriers with Strain-Engineered Grippers." MRS Advances, February, 1–8. https://doi.org/10.1557/adv.2019.6.
"Transferring Microelectromechanical Devices to Breathable Fabric Carriers with Strain-Engineered Grippers." 2018. Poster presented at the Fall Materials Research Society Meeting, Boston, MA, November 25.
Lucas, T. M., Porter, D. A., Beharic, J., Berfield, T. A., and Harnett, C. K. 2017. "Bistability in a symmetric out-of-plane microstructure." Microsystem Technologies 23 (7): 2569–76. https://doi.org/10.1007/s00542-016-2992-2.
Harnett, C. K. 2016. "Flexible circuits with integrated switches for robotic shape sensing." In Sensors for Next-Generation Robotics, Paper 9859-18. Baltimore, MD. https://doi.org/http://dx.doi.org/10.1117/12.2235356.
Beharic, J., T. M. Lucas, Senousy, Y. M., and Harnett, C. K. 2014. "Flexible Bistable MEMS Bridges." In Proceedings of Microtech 2014. Washington, D. C.
Lucas, T. M., James, K. T., Beharic, J., Moiseeva, E. V., Keynton, R. S., O'Toole, M. G., and Harnett, C. K. 2014. "Enhancing Light-Induced Thermal Actuation with Gold Nanoplates." In Proceedings of Microtech 2014. Washington, D. C.
Beharic, J., T. M. Lucas, and C. K. Harnett. 2014. "Analysis of a compressed bistable buckled beam on a flexible support." Journal of Applied Mechanics, April. https://doi.org/10.1115/1.4027463.
Lucas, Thomas M., Kurtis T. James, Jasmin Beharic, Evgeniya V. Moiseeva, Robert S. Keynton, Martin G. O'Toole, and Cindy K. Harnett. 2014. "Wavelength specific excitation of gold nanoparticle thin-films." Applied Physics Letters 104 (1): 011909. https://doi.org/10.1063/1.4861603.
Harnett, C. K., and Kimmer, C. J. 2013. "Digital origami from geometrically frustrated tiles." In ASME Proceedings of 37th Mechanisms and Robotics Conference, 6B:V06BT07A046; 9 pages. Portland, OR. https://doi.org/10.1115/DETC2013-13477.
Harnett, Cindy K. 2013. “Manufacturing Thin Films with Controlled Stress for Micro- and Nanomechanical Devices.” Presented at the NSF Workshop on Nano and Micro Manufacturing, Dearborn, MI, May 23.
Harnett, Cindy K. 2013. “Flexible Switching Sensors for Passive Shape Monitoring.” Presented at the International Society of Automation Passive Wireless Sensor Workshop, Washington, D. C., May 21.
Lucas, Thomas M., Evgeniya V. Moiseeva, and Cindy Harnett. 2013. “Thermal Properties of Infrared Absorbent Gold Nanoparticle Coatings.” A presented at the 7th International Conference on Microtechnologies in Medicine and Biology, Marina Del Rey, CA, April 10.
Harnett, C. K., and Kimmer, C. J. 2013. "Slides: Digital origami from geometrically frustrated tiles." Slideshow, Portland, OR.
Lucas, Thomas M., Evgeniya V. Moiseeva, Guandong Zhang, Andre M. Gobin, and Cindy K. Harnett. 2013. "Thermal Properties of Infrared Absorbent Gold Nanoparticle Coatings for MEMS Applications." Sensors and Actuators A: Physical 198: 81–86.
Stewart, Robert L., James F. Fox, and Cindy K. Harnett. 2013. "Time-Average Velocity and Turbulence Measurement Using Wireless Bend Sensors in Open Channel with Rough Bed." Journal of Hydraulic Engineering.
Harnett, Cindy K. 2012. “Folding and Flowing: Applications of Micro- and Nanostructures in Biotechnology.” Presented at the Kentucky Innovation and Entrepreneurship Conference, Louisville, KY, May 31.
Moiseeva, Evgeniya V., Thomas M. Lucas, Guandong Zhang, Andre M. Gobin, and Cindy K. Harnett. 2012. “Development of a MEMS Bistable Actuator Integrated with Nanoparticles.” Poster presented at the 17th Annual KY EPSCoR Conference, May 17.
Moiseeva, Evgeniya V., Thomas M. Lucas, Guandong Zhang, Andre M. Gobin, and Cindy K. Harnett. 2012. “Light-Powered Nanoparticle-MEMS Hybrid.” Presented at the American Physical Society Meeting, Boston, MA, February 27.
Lucas, Thomas M., Evgeniya V. Moiseeva, Guandong Zhang, Andre M. Gobin, and Cindy K. Harnett. 2012. “Design and Simulation of Optically Actuated Bistable MEMS.” Poster presented at the American Physical Society Annual Meeting, Boston, MA, February 27.
Senousy, Yehya M. 2012. “Fabrication of Out-of-Plane Electrodes for ACEO Pumps.” Poster presented at the American Physical Society Annual Meeting, Boston, MA, February 27.
Lucas, T. M., and C. K. Harnett. 2011. "Control of electrolysis-generated microbubbles for sensor surface passivation." Applied Physics Letters 98 (1): 011915–011915. https://doi.org/10.1063/1.3541448.
Goessling, B. A., T. M. Lucas, E. V. Moiseeva, J. W. Aebersold, and C. K. Harnett. 2011. "Bistable out-of-plane stress-mismatched thermally actuated bilayer devices with large deflection." Journal of Micromechanics and Microengineering 21 (6): 065030.
Harnett, Cindy K., Matthew T. Schueler, Nick R. Blumenthal, Kristy L. Hopf, Jimmy F. Fox, and Sruti Pulugurtha. 2011. "Calibration and field deployment of low-cost fluid flow-rate sensors using a wireless network." Instrumentation and Measurement, IEEE Transactions On 60 (2): 633–41.
Harnett, C. K., E. V. Moiseeva, B. A. Casper, and L. J. Wilson. 2010. "Microscopic containers for sample archiving in environmental and biomedical sensors." In Instrumentation and Measurement Technology Conference (I2MTC), 2010 IEEE, 328–31.
Senousy, Y. M., E. V. Moiseeva, and C. K. Harnett. 2008. "Strain-induced three-dimensional microfabrication for advanced antenna architectures." In University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial, 220–22.
Harnett, C. K., E. V. Moiseeva, and Y. M. Senousy. 2007. "Embeddable Metal Coil Microparticles for 3-D Metamaterial Applications."
Moiseeva, E. V., Y. M. Senousy, and C. K. Harnett. 2007. "Strain-based self assembly of nanostructures for non-destructive large-scale integration."
Moiseeva, E., Y. M. Senousy, S. McNamara, and C. K. Harnett. 2007. "Single-mask microfabrication of three-dimensional objects from strained bimorphs." Journal of Micromechanics and Microengineering 17 (9): N63.
Harnett, Cindy, Huichan Zhao, and Robert Shepherd. n.d. Stretchable optical fibers for strain-sensitive textiles. App 16/965,444.
Harnett, Cindy K, Jasmin Beharic, Canisha Ternival, Sushmita Challa, and Mohammad Shafquatul Islam. n.d. Microgrippers for Transferring Devices to Fibrous Surfaces. App 16/983,405.
Harnett, Cindy. n.d. Self-configuring contact arrays for interfacing with electric circuits and fabric carriers. App 17/052,608.

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